The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2004
Filed:
Mar. 28, 2001
Karsten Wieczorek, Boxdorf, DE;
Manfred Horstmann, Dresden, DE;
Christian Krueger, Liegau-Augustusbad, DE;
Advanced Micro Devices, Inc., Austin, TX (US);
Abstract
Test wafer consumption is a significant contributor to overall cost of manufacturing in semiconductor industry due to scrapping the test wafers after one monitoring of implantation parameters. This invention provides a method to reuse the same test wafer for monitoring the implantation parameters more than once. This method comprises the possibility of implanting the same implant species together with identical implanting and annealing conditions as well as of implanting a broad variety of implant species together with varying implanting and annealing conditions. Therefore, this invention helps to significantly reduce the number of test wafers consumed in the implant-area.