The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 22, 2004
Filed:
Jan. 31, 2002
Jerry J. Broz, Longmont, CO (US);
Cheryl D. Hartfield, McKinney, TX (US);
Reynaldo M. Rincon, Richardson, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
An apparatus ( ) and method ( ) for predicting electrical property stability of a thin film or conductive substrate ( ) prior to multi-probe testing. The present invention utilizes a nanoindenter type device ( ) obtaining mechanical properties as a function of displacement depth and applied load into the bond pad surface to accurately predict electrical property stability of the entire substrate or sample under test. In addition, the present invention includes a nanoindenter type device ( ) including a second probe ( ) having the ability to measure localized electrical properties of the sample while obtaining the mechanical property measurements. This additional electrical measurement is correlated with the mechanical property measurements to accurately predict electrical property stability of the entire conductive substrate, preferably by predicting the presence of an unwanted material surface layer.