The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2004
Filed:
Jul. 02, 2001
Applicant:
Inventor:
Boson Lin, Hsin Chu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Hsin-chu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1336 ;
U.S. Cl.
CPC ...
H01L 2/1336 ;
Abstract
A split-gate flash memory cell having a spacer-like floating gate is disclosed as well as a method of forming the same. This is accomplished by defining a floating area opening in a structure layer over a substrate, and forming polysilicon spacers along the vertical walls of the opening. Then an intergate oxide is formed over the spacer-like floating gates followed by the forming of individual control gates. Thus, a flash memory is formed having two independent cells with their own spacer floating gates and control gates sharing one source with the capability of being shrunk in size much more readily than conventionally possible.