The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6730973 B1

PDF
Full Text
Expired
Date of Patent:
May. 04, 2004

Filed:

Dec. 16, 2002
Applicant:
Inventors:

Yasuhiro Hibi, Hyogo, JP;

Tsuyoshi Sugihara, Hyogo, JP;

Satoshi Shimizu, Hyogo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/994 ; H01L 2/976 ;
U.S. Cl.
CPC ...
H01L 2/994 ; H01L 2/976 ;
Abstract

A first pattern forming a memory cell is provided on a memory cell region, and a second pattern consisting of a film containing nitrogen atoms is provided on the first pattern. A third pattern forming a gate electrode of a transistor so that the height between the main surface of a semiconductor substrate and the surface of the third pattern is lower than the first pattern is provided on a peripheral circuit region, and a fourth pattern consisting of a film containing nitrogen atoms having a larger thickness than the second pattern is provided on the third pattern in correspondence to the third pattern. The thickness of a portion of the interlayer dielectric film located between the second pattern and a second conductive layer is smaller than the thickness of a portion of the interlayer dielectric film located between the fourth pattern and the second conductive layer.


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Hibi, Yasuhiro. (2004). Semiconductor device (U.S. Patent No. 6730973). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6730973

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