The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2004
Filed:
Sep. 21, 2000
Applicant:
Inventors:
Jiong-Ping Lu, Richardson, TX (US);
Linlin Chen, Plano, TX (US);
David Gonzalez, Jr., Plano, TX (US);
Honglin Guo, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/144 ;
U.S. Cl.
CPC ...
H01L 2/144 ;
Abstract
A pre-ECD wet surface treatment. After forming the barrier material ( ) and seed layer ( ), the surface of the seed layer ( ) is treated with a water-based solution to remove surface contamination ( ) and improve wettability. The ECD copper film ( ) is then formed over the seed layer ( ).