The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 20, 2004
Filed:
Jun. 28, 2000
Applicant:
Inventors:
Mandeep Singh, Twickenham, GB;
Hugo M. Visser, Utrecht, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 2/742 ; G03B 2/752 ; G03B 2/754 ;
U.S. Cl.
CPC ...
G03B 2/742 ; G03B 2/752 ; G03B 2/754 ;
Abstract
Optical elements such as multilayered EUV mirrors are provided with protective capping layers of diamond-like carbon (C), boron nitride (BN), boron carbide (B C), silicon nitride (Si N ), silicon carbide (SiC), B, Pd, Ru, Rh, Au, MgF , LiF, C F and TiN and compounds and alloys thereof. The final period of a multilayer coating may also be modified to provide improved protective characteristics.
Singh, Mandeep. (2004). Capping layer for euv optical elements (U.S. Patent No. 6724462). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6724462
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile