The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6720601 B1

PDF
Full Text
Expired
Date of Patent:
Apr. 13, 2004

Filed:

Aug. 09, 2002
Applicant:
Inventors:

Takashi Terauchi, Hyogo, JP;

Akinobu Teramoto, Hyogo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/7108 ;
U.S. Cl.
CPC ...
H01L 2/7108 ;
Abstract

A semiconductor device having a structure in which the amount of stress on a semiconductor substrate or a gate wire is low, even in a case when the sidewalls of the gate wire are formed of a nitride film is obtained. A gate conductive layer positioned above a silicon substrate, a stress mitigating film that covers a sidewall of the gate conductive layer and a sidewall external layer spacer that covers the stress mitigating film and that exposes the upper edge of the stress mitigating film and the side edge of the bottom portion of the stress mitigating film are provided and the stress mitigating film has silicon oxide films positioned in the areas ranging inwardly from the upper edge and from the side edge so as to sandwich the silicon oxide film from both ends.


Find Patent Forward Citations

Terauchi, Takashi. (2004). Semiconductor device comprising a gate conductive layer with a stress mitigating film thereon (U.S. Patent No. 6720601). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6720601

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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