The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2004
Filed:
Mar. 30, 2001
Applicant:
Inventor:
Toshifumi Suganaga, Hyogo, JP;
Assignee:
Renesas Technology Corp., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 2/774 ; G03B 2/742 ; G03B 2/772 ;
U.S. Cl.
CPC ...
G03B 2/774 ; G03B 2/742 ; G03B 2/772 ;
Abstract
An exposure apparatus and an exposure method according to the present invention comprise an average illuminance operation unit for averaging illuminance values obtained from four illuminance meters provided on a stage and obtaining average illuminance and a light exposure control unit controlling a light exposure on the basis of information obtained from the average illuminance operation unit. Thus, an exposure apparatus and an exposure method capable of correctly managing the light exposure can be provided.