The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2004
Filed:
Nov. 26, 2001
OHT, Inc., Hiroshima, JP;
Abstract
The present invention provides an inspection apparatus and method capable of intuitively obtaining inspection results of circuit wirings. An inspection system comprises a sensor chip including plural sensor elements, a computer , probes for supplying an inspection signal to circuit wirings , and a selector for switching the supply of the inspection signal to the probes . The computer receives the detected signals from the sensor chip , and generates an image data to display an image of the circuit wirings as an inspection subject on a display . This make it possible to check the shape of the specific circuit wiring and to detect defects such as disconnection, short-circuit, and chipping in the circuit wiring based on the generated image data and the design image data representing the design circuit wiring.