The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2004
Filed:
Aug. 14, 2002
Yuk-Tong Lee, Fengshan, TW;
Hsing-Hung Lee, Chiai, TW;
Taiwan Semiconductor Manufacturing Co., Ltd, Hsin Chu, TW;
Abstract
In general, the present invention provides a seismic emergency response system (SERS) to control fabrication equipment and material flow for prevention of damage to wafers and equipment within a wafer fabrication plant during an earthquake. The SERS having a facility manager control system having one or a plurality of seismic detection devices, and at least one voting logic device for outputting an alarm triggering signal to a computer integrated manufacturing system; and a computer integrated manufacturing system having an emergency response system and an equipment server (tool application program) for sending a pause equipment command to an associated piece of equipment and a hold lot command to a material execution system to prevent damage of wafers during an earthquake. Optionally provided is one or a plurality of false alarm prevention devices and one or a plurality of enabling switches provided to selectively enable or disable the SERS.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile