The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2004
Filed:
Aug. 23, 2001
Applicant:
Inventors:
Rui-Fang Shi, Carlsbad, CA (US);
Carlos A. Duran, San Diego, CA (US);
Assignee:
KLA-Tencor Corporation, San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 1/10 ;
U.S. Cl.
CPC ...
G01J 1/10 ;
Abstract
The present invention is a method for providing a disk of an optical tester. The disk comprises a transparent substrate that has a first surface and an opposite second surface. The disk also includes a coating on the first surface of the transparent substrate. An identical coating can be applied to the second surface of the transparent substrate. The coating can have multiple layers of thin films. The present invention provides a method to determine the required thickness of the coating to enhance the sensitivity of zero flying height measurement.