The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2004
Filed:
Jan. 11, 2001
Applicant:
Inventors:
Udo Dinger, Oberkochen, DE;
Martin Ross-Messemer, Essingen, DE;
Assignee:
Carl Zeiss SMT AG, , DE;
Primary Examiner:
Int. Cl.
CPC ...
G21K 1/06 ;
U.S. Cl.
CPC ...
G21K 1/06 ;
Abstract
There is provided an optical apparatus for radiation with a wavelength ≦160 nm. The apparatus comprises a mirror with a mirror surface, and a first device for generating elastic oscillations with different acoustic wavelengths on the mirror surface due to surface deformations. Radiation impinging on the mirror surface is diffracted in a predetermined range of angles (&agr;).