The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2004
Filed:
Aug. 15, 2002
Hiroaki Saeki, Shirane-Machi, JP;
Keisuke Kondoh, Kofu, JP;
Tokyo Electron Limited, Tokyo-to, JP;
Abstract
In most cases, a hot, corrosive atmosphere is created in, for example, a semiconductor wafer processing chamber. When an arm including belts, such as steel belts, is moved into such a semiconductor wafer processing chamber, the belts are exposed to the hot, corrosive atmosphere. Belts, such as steel belts, have limited heat resistance and corrosion resistance and the hot, corrosive atmosphere in the processing chamber shortens the life of the belts. A carrying device of the present invention has a frog leg type arm ( ) and a wafer holder ( ) connected to the frog leg type arm ( ). The wafer holder ( ) is pivotally connected to front end parts of a first front arm ( A) and a second front arm ( B) by coaxial joints ( ). The wafer holder ( ) is linked to the first front arm ( A) and the second front arm ( B) by a posture maintaining linkage ( ) including two antiparallel linkages capable of controlling the turning of the wafer holder ( ) relative to the first and the second front arms ( A, B).