The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2004
Filed:
Jul. 02, 2001
Yuji Kamikawa, Tosu, JP;
Koji Egashira, Tosu, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A processing apparatus includes an inner cylinder (a processing chamber ) accommodated in a carrying unit for carrying an object to be processed and further seals up the object with the inner cylinder or a first stationary wall to process the object in contact with processing fluid. In this processing apparatus with sealing mechanism, flexible hollow packings are arranged doubly in either the inner cylinder or the first stationary wall , at its occluded part with the first stationary wall and the inner cylinder . The hollow packings have their hollow parts connected with respective pressurized-air sources through pressure-detecting switches and closing valves . By expanding or contracting the hollow packings , the operation of the apparatus is switched in between its sealing state and non-sealing state. With this arrangement, it is possible to improve the sealing capability and prolong the life of the mechanism.