The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 24, 2004
Filed:
Aug. 12, 2002
Nian Yang, San Jose, CA (US);
Zhigang Wang, Santa Clara, CA (US);
Hsiao-Han Thio, Sunnyvale, CA (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
A method of protecting a stacked gate structure of a flash memory device during fabrication is disclosed. Additionally, the manner of protecting the stacked gate structure during fabrication is simple to implement and is cost-effective. In particular, a protective layer is deposited on the stacked gate structure to protect the stacked gate structure before a resist removal process is performed a second time. Despite undergoing two resist removal processes, the stacked gate structure suffers less damage than the convention fabrication techniques, increasing the yield and reliability of the flash memory device.