The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2004
Filed:
Dec. 08, 2000
Parthiv S. Patel, San Diego, CA (US);
Joseph E. Conway, El Cajon, CA (US);
Muljadi Tantra, Pleasanton, CA (US);
Jeffrey W. Moen, Oceanside, CA (US);
Jason R. Carlesi, Ramona, CA (US);
Roger L. Green, Escondido, CA (US);
Tom A. Watson, Carlsbad, CA (US);
Christopher G. Rowan, Coronado, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A system for a monitoring lithography lasers at integrated circuit fabrication plants. Each laser at each fabrication plant has associated with it a terminal server. With respect to each fabrication plant a central control server unit is in communication with each of the lasers through a local area network. Information from the lasers is collected by the central control server unit and the information is used to provide summary information which is made available in a web site format to interested parties having access authorization.