The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2004
Filed:
Jan. 31, 2002
Minoru Ito, Sagamihara, JP;
Norimichi Anazawa, Shinjuku-ku, JP;
Holon Co., LTD, Tokyo, JP;
Abstract
An electronic beam transmitting through a mask is detected by a detector in which a plurality of elements is aligned in a plurality of lines while an image signal is transferred by the detector synchronously with movement of the mask, and high resolution due to a short wavelength of the electronic beam can be effectively utilized as well as an image signal is transferred at right angles to a line of the detector synchronously with same time detection of pixels in a direction of the line, so that an inspection of a mask with high resolution at high speed would be achieved, and furthermore, it would be achieved to produce an image scanned in a straight line with the extremely high accuracy without zigzag scan when a stage with an easy structure is used.