The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 03, 2004
Filed:
Sep. 24, 2001
Masayoshi Shirahata, Tokyo, JP;
Renesas Technology Corp., Tokyo, JP;
Abstract
A semiconductor device having a reduced overlap capacity between a gate electrode and extensions. Specifically, a stacked structure made up of a polysilicon film, tungsten silicide film, and silicon nitride film is partially formed in first and second regions of a silicon substrate, respectively. Sidewall oxide films are formed on side surfaces of the polysilicon films in the first and second regions, respectively. A width of the sidewall of the first structure is smaller than a width of the sidewall of the second structure such that an overlap amount between a second conductive layer and a second impurity region is smaller than an overlap amount between a first conductive layer and a first impurity region.