The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6683008 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 27, 2004

Filed:

Nov. 19, 2002
Applicant:
Inventors:

John Michael Cotte, New Fairfield, CT (US);

Kenneth John McCullough, Fishkill, NY (US);

Wayne Martin Moreau, Wappinger, NY (US);

Keith R. Pope, Danbury, CT (US);

John P. Simons, Wappingers Falls, NY (US);

Charles J. Taft, Wappingers Falls, NY (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1302 ; H01L 3/1471 ; H01L 2/1312 ;
U.S. Cl.
CPC ...
H01L 2/1302 ; H01L 3/1471 ; H01L 2/1312 ;
Abstract

A process of removing photoresist, previously subjected to ion implantation, from the surface of a workpiece. The process involves contacting the workpiece with a composition which includes liquid or supercritical carbon dioxide and between about 2% and about 20% of an alkanol having the structural formula C X OH, where X is fluorine, hydrogen or mixtures thereof; and x is an integer of 1 to 8, said percentages being by volume, based on the total weight of the composition.


Find Patent Forward Citations

Cotte, John. (2004). Process of removing ion-implanted photoresist from a workpiece (U.S. Patent No. 6683008). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6683008

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…