The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 27, 2004
Filed:
Mar. 05, 2003
Applicant:
Inventors:
Seung-Hyun Ahn, Suwon-Si, KR;
Sang-Mun Chon, Yongin-Si, KR;
Hoe-Sik Chung, Gyeonggi-Do, KR;
Mi-Sook Jeon, Seoul, KR;
Eun-Mi Bae, Yongin-Si, KR;
Baik-Soon Choi, Anyang-Si, KR;
Ok-Seok Jang, Gyeonggi-Do, KR;
Young-Cheul Lim, Gyeonggi-Do, KR;
Assignee:
Samsung Electronics Co., Ltd., Suwon, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/42 ;
U.S. Cl.
CPC ...
G03F 7/42 ;
Abstract
A thinner composition is effective in removing a variety of photoresists, and includes propylene glycol mono-methyl ether acetate, ethyl 3-ethoxy propionate and at least one of &ggr;-butyro lactone and propylene glycol mono-methyl ether. The thinner composition can selectively strip a photoresist coated on a backside and at an edge portion of a substrate, as well as a photoresist coated on a whole front surface of the substrate.