The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 13, 2004
Filed:
Oct. 26, 2001
Applicant:
Inventors:
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 2/708 ; G01R 3/126 ;
U.S. Cl.
CPC ...
G01R 2/708 ; G01R 3/126 ;
Abstract
A method for measuring the step height of a STI structure is described. The method involves measuring the change in resistance of a polysilicon structure as the step height changes. The resistance of the polysilicon structure is measured by applying a voltage and measuring the resulting current.