The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 30, 2003
Filed:
Apr. 02, 2003
Suryanarayana Kaja, Hopewell Junction, NY (US);
Chandrika Prasad, Wappingers Falls, NY (US);
RongQing Roy Yu, Poughkeepsie, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A process and apparatus are provided for electroplating a film onto a substrate having a top side including a plating surface includes the following steps. Provide a plating tank with an electroplating bath. Provide an anode in the bath. Place a substrate having a plating surface to be electroplated into the electroplating bath connecting surfaces to be plated to a first cathode. Support a second cathode including a portion thereof with openings therethrough extending across the plating surface of the substrate and positioned between the substrate and the anode. Connect power to provide a negative voltage to the first cathode and provide a negative voltage to the second cathode, and provide a positive voltage to the anode.