The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2003
Filed:
Dec. 27, 2001
Jürgen Hartmaier, Aalen, DE;
Dietrich Klaassen, Oberkochen, DE;
Thure Boehm, Aalen, DE;
Bernhard Wergl, Steinheim, DE;
Michael Gerhard, Aalen-Ebnat, DE;
Jens Spanuth, Aalen, DE;
Ralf Kuschnereit, Oberkochen, DE;
Peter Vogt, Heidenheim, DE;
Harry Bauer, Aalen, DE;
Carl Zeiss SMT AG, , DE;
Abstract
A device is used to hold an optical element, in particular one made of a crystalline material, in particular of CaF , while the optical element is being coated, in particular by the vapor-deposition of at least one functional layer in a vacuum coating plant. The latter has a device for mounting the optical element, it being possible for the optical element to be heated in the vacuum coating plant via suitable radiation, in particular infrared radiation. An intermediate element which has a lower thermal absorption than the device for mounting the optical element is arranged between the device for mounting the optical element and the optical element.