The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 23, 2003
Filed:
Dec. 18, 2001
Steven Shannon, San Mateo, CA (US);
Daniel Hoffman, Saratoga, CA (US);
Chunshi Cui, San Jose, CA (US);
Yan Ye, Saratoga, CA (US);
Gerardo Delgadino, Santa Clara, CA (US);
Douglas A. Buchberger, Jr., Livermore, CA (US);
Shiang-Bau Wang, Hsinchu, TW;
Robert B. Hagen, Newark, CA (US);
Matthew L Miller, Newark, CA (US);
Stephen Thai, Milpitas, CA (US);
Applied Materials, Inc, Santa Clara, CA (US);
Abstract
An RF power applicator of the reactor includes inner and outer conductive radial spokes. The set of inner conductive spokes extends radially outwardly from and is electrically connected to the conductive post toward the conductive side wall. The set of outer conductive spokes extends radially inwardly toward the conductive post from and is electrically connected to the conductive side wall. In this way, the inner and outer sets of conductive spokes are electrically connected together, the combination of the inner and outer set of spokes with the conductive enclosure having a fundamental resonant frequency inversely proportional to the height of the conductive enclosure and the lengths of the inner and outer set of conductive spokes. An RF source power generator is coupled across the RF power applicator and has an RF frequency corresponding to the fundamental resonant frequency.