The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 25, 2003
Filed:
Oct. 05, 2001
Applicant:
Inventors:
Michael G. Brown, Valerico, FL (US);
Ivan Eliashevich, South Orange, NJ (US);
Keng Ouyang, Belle Mead, NJ (US);
Hari Venugopalan, Somerset, NJ (US);
Assignee:
Emcore Corporation, Somerset, NJ (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/128 ; H01L 2/13205 ;
U.S. Cl.
CPC ...
H01L 2/128 ; H01L 2/13205 ;
Abstract
A contact for n-type III-V semiconductor such as GaN and related nitride-based semiconductors is formed by depositing Al,Ti,Pt and Au in that order on the n-type semiconductor and annealing the resulting stack, desirably at about 400-600° C. for about 1-10 minutes. The resulting contact provides a low-resistance, ohmic contact to the semiconductor and excellent bonding to gold leads.