The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 18, 2003
Filed:
May. 03, 2002
Mohan Chandra, Merrimack, NH (US);
David M. Darling, Amherst, NH (US);
L. Dolan Roman, Nashua, NH (US);
Carl P. Chartier, Manchester, NH (US);
Glen Alan Burgess, Hudson, NH (US);
G.T. Equipment Technologies, Inc, Merrimack, NH (US);
Abstract
An apparatus for the automated measurement and recording of the electrical resistivity of a semiconductor boule or ingot using the method of four probes has a four point boule support grid is provided adjacent to the home position of a four tip probe which is equipped with three axis linear mobility, rotational capability, and computer control, to provide automated mapping and testing of an “as grown” or ground semiconductor boule with cropped ends, for obtaining and recording resistivity data.