The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 04, 2003
Filed:
Mar. 05, 2002
Applicant:
Inventors:
Chien-Ping Lien, Kaohsiung, TW;
Ching-Feng Tsai, Hsinchu, TW;
Assignee:
Promos Technologies Inc, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 5/700 ;
U.S. Cl.
CPC ...
B24B 5/700 ;
Abstract
A slurry distributor having a base section, a main body section, a distributing structure (sidewall section) and a connecting structure. The main body section is above the base section and the distributing structure is above the main body section. The distributing structure accommodates one or more types of slurry, mixes up the different slurry types and channels out the well-mixed slurry. The distributing structure also has a plurality of holes close to the main body section. The connecting structure is inside the base section for engaging with a chemical-mechanical polishing installation.