The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 21, 2003
Filed:
Sep. 28, 2000
Applicant:
Inventors:
Haruhiko Yoshioka, Higashiyamanashi-gun, JP;
Shinji Iino, Kitakoma-gun, JP;
Yutaka Akaike, Nishiyatsushiro-gun, JP;
Masaru Suzuki, Kofu, JP;
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01M 1/900 ; G01R 3/126 ;
U.S. Cl.
CPC ...
G01M 1/900 ; G01R 3/126 ;
Abstract
A rotating mechanism according to the present invention is a mechanism for reversibly rotating a chuck top , on which a wafer to be inspected is mounted. The rotating mechanism is provided with a linearly driving mechanism arranged on one side of the chuck top , a nut which is linearly moved by the linearly driving mechanism, a guide rail A for linearly guiding the nut , and a link mechanism for coupling the nut , which moves along the guide rail A, to the chuck top