The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 14, 2003
Filed:
Sep. 30, 1999
Applicant:
Inventors:
Vlasta Brusic, Geneva, IL (US);
Daniel C. Edelstein, New Rochelle, NY (US);
Paul M. Feeney, Richmond, VT (US);
William Guthrie, Saratoga, CA (US);
Mark Jaso, Fairfax Station, VA (US);
Frank B. Kaufman, Geneva, IL (US);
Naftali Lustig, Croton-on-Hudson, NY (US);
Peter Roper, Clinton Corners, NY (US);
Kenneth Rodbell, Sandy Hook, CT (US);
David B. Thompson, Sunnyvale, CA (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09K 1/300 ; C09K 1/306 ; H01L 2/1302 ;
U.S. Cl.
CPC ...
C09K 1/300 ; C09K 1/306 ; H01L 2/1302 ;
Abstract
Copper or a copper alloy is removed by chemical-mechanical planarization (CMP) in a slurry of an oxidizer, an oxidation inhibitor, and an additive that appreciably regulates copper complexing with the oxidation inhibitor.