The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2003
Filed:
Jan. 03, 2001
Seiji Ishikawa, Yokohama, JP;
Masao Sakata, Ebina, JP;
Jun Nakazato, Tokyo, JP;
Sadao Shimoyashiro, Fujisawa, JP;
Hiroto Nagatomo, Tokyo, JP;
Yuzo Taniguchi, Higashimurayama, JP;
Osamu Satou, Koganei, JP;
Tsutomu Okabe, Kodaira, JP;
Yuzaburo Sakamoto, Takasaki, JP;
Kimio Muramatsu, Takasaki, JP;
Kazuhiko Matsuoka, Takasaki, JP;
Taizo Hashimoto, Takasaki, JP;
Yuichi Ohyama, Isesaki, JP;
Yutaka Ebara, Maebashi, JP;
Isao Miyazaki, Isesaki, JP;
Shuichi Hanashima, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And, in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.