The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 30, 2003
Filed:
Dec. 27, 2000
Applicant:
Inventors:
Megumi Takemoto, Tokyo, JP;
Shigeki Maekawa, Tokyo, JP;
Yoshihiro Kashiba, Tokyo, JP;
Yoshinori Deguchi, Tokyo, JP;
Masahiro Tanaka, Tokyo, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/073 ;
U.S. Cl.
CPC ...
G01R 1/073 ;
Abstract
A probe card for testing a semiconductor integrated circuit is provided with a plurality of probes for inputting/outputting an electric signal for verifying the operation of a semiconductor integrated circuit to/from bonding pads of the semiconductor integrated circuit. The probes are formed by depositing a conductive film on a surface of a plurality of convex portions formed on a surface of an insulating substrate