The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 23, 2003
Filed:
Jun. 28, 2001
Tahorng Yang, Hsinchu, TW;
Macronix International Co., Ltd., Hsinchu, TW;
Abstract
A method is used to form an insulating layer with foamed structure. About the method, a gel layer over a substrate, where the gel layer includes several types of solution, an unextractable material, and a solvent. The substrate is then put in a closed pressure chamber. The closed pressure chamber is heated to a subcritical temperature with respect to the material which is included in the gel layer but to be extracted out. In this situation, liquid and the material to be extracted all turn to a vapor phase due to the pressure in the pressure chamber has reached the subcritical pressure, whereby materials are extracted. Under this temperature, the vapor is flushed away, and a noble gas is flushed into the pressure chamber for cleaning. The substrate with the gel layer is cooled down to the environmental temperature. Then the substrate is taken out from the pressure chamber.