The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2003
Filed:
Oct. 15, 1999
James David Hunt, Charlotte, NC (US);
Lee Dante Clementi, Lake Wylie, SC (US);
Charles A. Monjak, Clover, SC (US);
ADE Corporation, Westwood, MA (US);
Abstract
Full surface maps of slope and height are determined for the surface of a highly smooth surface such as a silicon wafer, by an apparatus which includes a light source for creating a light beam and scanning and wafer transport systems which cause the incident beam to be scanned over the full surface of the wafer. A quad cell light detector is positioned to receive the beam specularly reflected from the wafer surface, the quad cell detector having four cells arranged in quadrants with each cell providing an electrical signal indicative of the amount of light received by the cell. A processor is programmed to calculate changes in spot location on the detector based on the signals from the cells, and to calculate changes in surface slopes based on the changes in spot location. Full maps of X- and Y-slope are produced, and a line integration algorithm is used for calculating full surface height maps. Regions of surface height gradient exceeding a threshold are flagged as defects by the processor.