The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 16, 2003
Filed:
Jul. 13, 2001
Applicant:
Inventors:
James Van Gogh, Sunnyvale, CA (US);
Jim Thompson, Palo Alto, CA (US);
Marc Schweitzer, San Jose, CA (US);
Yoichiro Tanaka, Sunnyvale, CA (US);
Alan Liu, Mountain View, CA (US);
Anthony CT Chan, Los Altos Hills, CA (US);
Karl Brown, Mountain View, CA (US);
John C. Forster, San Francisco, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/434 ;
U.S. Cl.
CPC ...
C23C 1/434 ;
Abstract
An apparatus for a physical vapor deposition system includes a target having a sidewall having an undercut thereon defining a net erosion area and a net redeposition area.