The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 09, 2003
Filed:
Feb. 16, 2000
Andrew M. Hawryluk, Los Altos Hills, CA (US);
Joe Gortych, Winooski, VT (US);
Yu Chue Fong, Fremont, CA (US);
Ultratech Stepper, Inc., San Jose, CA (US);
Abstract
A radiation shield device ( ) and method, the apparatus comprising either an absorbing shield ( ), a scattering shield ( ) or an absorbing and scattering shield ( ) arranged in a processing tool ( ) that irradiates a workpiece ( ) with high-irradiance radiation ( ) from a light source ( ). The processing tool has a tool portion ( ) having an irradiance damage threshold (I ). The radiation shield device is designed to intercept a portion of the high-irradiance radiation that would otherwise be incident the tool portion, and to ensure that radiation exiting the particular shield comprising the radiation shield device and incident the tool portion has an irradiance below the tool portion irradiance damage threshold. The method includes using the radiation shield device in processing a workpiece using a processing tool.