The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 02, 2003
Filed:
Oct. 25, 2000
Keizo Yamada, Tokyo, JP;
Tohoru Tsujide, Tokyo, JP;
Fab Solutions, Inc., , JP;
Abstract
A semiconductor manufacturing apparatus, which performs predetermined processing for a group of wafers supplied by a preprocessor that performs preliminary processing, comprises a data storage unit for storing wafer processing history data received from the pre-processor, a target value storage unit for storing a processing target value for the semiconductor manufacturing apparatus, an identification unit for identifying a wafer supplied by the pre-processor, a processor for employing the wafer processing history data and the processing target value to determine processing conditions for the wafer identified by the identification unit, a conveying unit for transporting the wafer from the identification unit to a wafer processor, a controller for controlling the wafer processor in accordance with the wafer processing conditions instructed by the processor, and a determination unit for examining the condition of the wafer that has been processed by the wafer processor to determine whether the wafer is good or bad, wherein, in accordance with the results obtained by the determination unit, the processor determines whether the processing of the wafer is to again be performed by the wafer processor, and as necessary, again sets the processing conditions.