The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 19, 2003
Filed:
Oct. 12, 1999
Applicant:
Inventors:
Ernst Hendrik August Granneman, Hilversum, NL;
Albert Hasper, Meppel, NL;
Jan Zinger, Dwingeloo, NL;
Assignee:
ASM International N.V., Bilthove, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/600 ; H01L 2/100 ; B65G 6/900 ;
U.S. Cl.
CPC ...
C23C 1/600 ; H01L 2/100 ; B65G 6/900 ;
Abstract
Device for processing semiconductor wafers, comprising at least one processing chamber which is completely closed with the exception of a connection to a distribution. System. In said at least one processing chamber there are situated preferably two reactors and a common feed/removal system in order to be able to subject wafers, which may optionally be arranged in boats, to an identical processing operation.
Published as:
NL1005102C2; WO9836444A1; AU5682898A; EP0960434A1; TW386242B; JP2000511710A; KR20000070506A; EP0960434B1; DE69804944D1; DE69804944T2; JP3403207B2; US6607602B1; KR100411968B1;