The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 05, 2003

Filed:

Feb. 23, 2000
Applicant:
Inventors:

Guobiao Zhang, ElGerrito, CA (US);

Chenming Hu, Alamo, CA (US);

Steve S. Chiang, Saratoga, CA (US);

Assignee:

Actel Corporation, Sunnyvale, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/900 ;
U.S. Cl.
CPC ...
H01L 2/900 ;
Abstract

The present invention relates to a high performance, high reliability antifuse using conductive electrodes. According to first and second embodiments, the problem of switch-off in conductor-to-conductor antifuses is solved by utilizing conductive electrode materials having a relatively lower thermal conductivity than prior art electrode materials and by utilizing relatively thin electrodes, thus increasing their thermal resistance. According to a third embodiment, a relatively thin barrier layer is placed between one or both of the low thermal conductivity electrodes and the antifuse material to prevent reaction between the conductive electrodes and the antifuse material, or the materials used in manufacturing. According to a fourth embodiment, low thermal conductivity conductors are used for both electrodes in the conductor-to-conductor antifuse to achieve enhanced reliability and freedom from switch-off. According to a fifth embodiment, switch-off is cured in conductor-to-conductor antifuses without compromising low on-state resistance of the antifuse.


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