The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2003
Filed:
Jun. 26, 1998
Applicant:
Inventors:
Mark R. Visokay, Dallas, TX (US);
Luigi Colombo, Dallas, TX (US);
Rajesh Khamankar, Irving, TX (US);
Mark A. Kressley, Richardson, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/976 ;
U.S. Cl.
CPC ...
H01L 2/976 ;
Abstract
An electrode structure for a capacitor. The electrode structure includes a contact plug comprising an oxidation barrier and a bottom electrode comprising a conductive adhesion-promoting portion and an oxidation-resistant portion , the adhesion-promoting portion contacting the oxidation barrier of the contact plug. In further embodiments, the oxidation barrier and adhesion-promoting portion comprise Ti—Al—N.