The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2003
Filed:
Apr. 05, 2002
Seung-Hyun Ahn, Suwon-Si, KR;
Sang-Mun Chon, Yongin-Si, KR;
Hoe-Sik Chung, Gyeonggi-Do, KR;
Mi-Sook Jeon, Seoul, KR;
Eun-Mi Bae, Yongin-Si, KR;
Baik-Soon Choi, Anyang-Si, KR;
Ok-Seok Jang, Gyeonggi-Do, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
A photoresist stripper composition is made up of a mixture of an acetic acid ester, &ggr;-butyrolactone (GBL), and a non-acetate ester or a poly alkyl alcohol derivative. The acetic acid ester may be at least one of n-butyl acetate, amyl acetate, ethyl aceto-acetate, and isopropyl acetate. The non-acetate ester may be at least one of ethyl lactate (EL), ethyl-3-ethoxy propionate (EEP) and methyl-3-methoxy (MMP). The poly alkyl alcohol derivative may be at least one of propylene glycol monomethyl ester (PGME) and propylene glycol monomethyl ester acetate (PGMEA).