The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2003
Filed:
Aug. 11, 2000
Applicant:
Inventors:
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/168 ; H01L 2/1304 ;
U.S. Cl.
CPC ...
H01L 2/168 ; H01L 2/1304 ;
Abstract
A device for processing a substrate comprises a processing vessel ( ), an outer vessel ( ) for surrounding the processing vessel ( ) which outer vessel ( ) can be sealed, a first supporting member ( ) for bringing the substrate ( ) into and out from the processing vessel ( ) which first supporting member ( ) supports the substrate ( ) in a standing manner, and a second supporting member ( ) for transferring the substrate ( ) between the first supporting member ( ) which second supporting member ( ) is movable up and down within the processing vessel ( ). The device processes the entire surface of the substrate ( ) uniformly and prevents varying in processing from occurrence.