The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2003
Filed:
Jul. 14, 1999
Mark Charles Carbone, Mountain View, CA (US);
Frank Otto Uher, Los Altos, CA (US);
John William Andberg, Santa Cruz, CA (US);
Jerzy Lobacz, San Mateo, CA (US);
Donald Paul Richmond, II, Palo Alto, CA (US);
Aehr Test Systems, Fremont, CA (US);
Abstract
A cartridge ( ) includes a chuck plate ( ) for receiving a wafer ( ) and a probe plate ( ) for establishing electrical contact with the wafer. In use, a mechanical connecting device ( ) locks the chuck plate and the probe plate fixed relative to one another to maintain alignment of the wafer and the probe plate. Preferably, electrical contact with the wafer is established using a probe card ( ) that is movably mounted to the probe plate by means of a plurality of leaf springs ( ). The mechanical connecting device is preferably a kinematic coupling including a male connector ( ) and first and second opposed jaws ( ). The cartridge can then be removed from the alignment device and placed in a burn-in or test chamber that does not itself require means for aligning the wafer or for providing a probing force.