The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2003
Filed:
Sep. 26, 2001
Applicant:
Inventors:
Shirou Takigawa, Nishinomiya, JP;
Kouichi Nose, Nishinomiya, JP;
Yasuhiro Koizumi, Nishinomiya, JP;
Takanobu Hori, Nishinomiya, JP;
Yukio Miya, Kawagoe, JP;
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/400 ; C23C 1/600 ;
U.S. Cl.
CPC ...
C23C 1/400 ; C23C 1/600 ;
Abstract
An arc evaporator comprises: an anode; an evaporation source electrode as a cathode; and a current control unit for supplying an AC square wave arcing current across the anode and the evaporation source electrode.