The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2003
Filed:
Dec. 22, 1999
Applicant:
Inventors:
Koichiro Moriyama, Kyotanabe, JP;
Masahiro Kanai, Tokyo, JP;
Hirokazu Ohtoshi, Nara, JP;
Tadashi Hori, Nara, JP;
Naoto Okada, Nara, JP;
Hiroshi Shimoda, Kyotanabe, JP;
Hiroyuki Ozaki, Kyotanabe, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/100 ;
U.S. Cl.
CPC ...
H01L 2/100 ;
Moriyama, Koichiro. (2003). Apparatus and method for processing a substrate (U.S. Patent No. 6576061). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6576061
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile