The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2003
Filed:
Feb. 28, 2001
Applicant:
Inventors:
Rudolf Gujer, Saratoga, CA (US);
Thomas K. Cho, Palo Alto, CA (US);
Lily L. Pang, Fremont, CA (US);
Michael P. Karazim, San Jose, CA (US);
Tetsuya Ishikawa, Santa Clara, CA (US);
Assignee:
Applied Materials Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/168 ; C23L 1/600 ;
U.S. Cl.
CPC ...
H01L 2/168 ; C23L 1/600 ;
Abstract
A modular lift-pin assembly comprises a lift-pin having a distal end and a connector having a lift-pin end and an actuator end. The lift-pin end of the connector is coupled to the distal end of the lift-pin and an actuator pin is then coupled to the actuator end of the connector to actuate the lift-pin through the connector.