The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2003
Filed:
Nov. 30, 2001
Applicant:
Inventors:
Cheng-Hung Yu, Hsinchu, TW;
Chi-Liang Kuo, Hsinchu, TW;
Assignee:
United Microelectronics Corp., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01D 2/100 ;
U.S. Cl.
CPC ...
G01D 2/100 ;
Abstract
A structure, a fabrication method and an application of an overlay mark. The overlay mark structure has an outer mark and an inner mark. The outer mark encloses a cross area that has two central axes. The inner mark has four strip patterns arranged in two central axes and extend outwardly towards four directions from the central part of the closed cross area.