The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2003
Filed:
Jul. 06, 2000
Koji Atoh, Kanagawa-ken, JP;
Ebara Corporation, Tokyo, JP;
Abstract
A substrate cleaning apparatus comprises a side surface cleaning member and a peripheral edge cleaning member. The side surface cleaning member includes a cylindrical scrub cleaning body having a cylindrical surface and opposite ends. The cylindrical scrub cleaning body is adapted to be rotated about its axis with the cylindrical surface thereof engaged with a side surface of a substrate to be cleaned to effect scrub cleaning of the side surface. The peripheral edge cleaning member is adapted to be engaged with a peripheral edge of the substrate to effect scrub cleaning of the peripheral edge. The peripheral edge cleaning member is attached to one of the opposite ends of the cylindrical scrub cleaning body so as to be rotated along with the cylindrical scrub cleaning body about the axis of the cylindrical scrub cleaning body. The peripheral edge cleaning member comprises a sponge member adapted to be engaged with and scrub the peripheral edge of the substrate. The cylindrical scrub cleaning body may also be made of a sponge member and integrally formed with the sponge member comprising the peripheral edge cleaning member. The peripheral cleaning member may comprise a plurality of bristles instead of the cylindrical sponge member.