The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2003
Filed:
Feb. 05, 1998
Applicant:
Inventors:
Volker Becker, Marxzell, DE;
Franz Laermer, Stuttgart, DE;
Michael Offenberg, Kirchentellinsfurt, DE;
Andrea Schilp, Schwaebisch Gmuend, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23F 1/00 ; C23F 1/12 ; C23F 1/14 ; C23F 1/24 ;
U.S. Cl.
CPC ...
C23F 1/00 ; C23F 1/12 ; C23F 1/14 ; C23F 1/24 ;
Abstract
A method of sacrificial layer etching of micromechanical surface structures, in which a sacrificial layer is deposited on a heatable silicon substrate and is structured. A temperature difference between the substrate and the vapor phase of an etching medium is established in such a way that exposed metal contacts made of aluminum alloys are not attacked at the same time and are not subsequently exposed to any risk of corrosion.