The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 22, 2003

Filed:

Feb. 22, 2000
Applicant:
Inventors:

Wajih Dalal, Palo Alto, CA (US);

Song Miao, San Jose, CA (US);

Assignee:

Schlumberger Technologies, Inc., San Jose, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/128 ;
U.S. Cl.
CPC ...
G01R 3/128 ;
Abstract

Tester edge placement accuracy (EPA) is important for testing of semiconductor component devices. The value of that accuracy is quantified to the device manufacturer in terms of yield loss and bad parts sold as good parts (escapes in DPM). A simulation is presented that models the tester accuracy, the device edge distribution and their interaction for a example device having an operating speed of 800 Mbps. The same model can be applied for microprocessors or other parts that operate near the limits of ATE performance. In an example given, the estimated losses due to lack of appropriate tester accuracy are considerable: with the estimated yields and selling prices for the example device, the model shows a value of over $1 M for every 1 ps of enhanced tester edge placement accuracy.


Find Patent Forward Citations

Loading…