The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2003
Filed:
Oct. 02, 2000
Mitutoyo Corporation, Kawasaki, JP;
Abstract
A phase shift interferometer ( ) images a plurality of interference fringe images each generated from interference between a test light reflected at a test surface ( ) and a reference light reflected at an reference surface ( ) by emitting a coherent light to both surfaces while varying a phase difference between the test light and the reference light from image to image. A surface shape analyzer ( ) analyzes the plurality of interference fringe images taken by the phase shift interferometer ( ) to obtain surface shape information of the test surface ( ). A typical plane computer ( ) computes a typical plane of the test surface ( ) on the basis of the surface shape information obtained from the surface shape analyzer ( ). An oblique angle computer ( ) computes an oblique angle of the typical plane computed by the typical plane computer ( ) to the reference surface ( ). An attitude adjusting mechanism ( ) automatically adjusts the attitude of the test surface ( ) relative to the reference surface ( ) on the basis of information of the oblique angle computed by the oblique angle computer ( ).